Inventor

PARNELL DONI

BE4 patents

⚠️ This page may combine multiple inventors who share the name “PARNELL DONI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IMEC VZW

2 patents

US9391141B2Jul 12, 2016

Method for producing fin structures of a semiconductor device in a substrate

IMEC VZW11 citations81

US10192956B2Jan 29, 2019

Method for producing fin structures of a semiconductor device in a substrate

IMEC VZW0 citations49

TOKYO ELECTRON LTD

2 patents

US11087973B2Aug 10, 2021

Method of selective deposition for BEOL dielectric etch

TOKYO ELECTRON LTD0 citations58

US10319905B2Jun 11, 2019

Method and system for performing post-etch annealing of a workpiece

TOKYO ELECTRON LTD0 citations34