Inventor
OBWEGER RAINER
AT19 patents
⚠️ This page may combine multiple inventors who share the name “OBWEGER RAINER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OBWEGER RAINER
8 patentsUS8485204B2Jul 16, 2013
Closed chamber with fluid separation feature
OBWEGER RAINER9 citations82
US8791614B2Jul 29, 2014
Device for treating disc-like article and method for operating same
OBWEGER RAINER5 citations71
US8833380B2Sep 16, 2014
Device for treating disc-like articles
OBWEGER RAINER2 citations60
US8490634B2Jul 23, 2013
Device for treating disc-like articles
OBWEGER RAINER3 citations60
US8974631B2Mar 10, 2015
Device for fluid treating plate-like articles
OBWEGER RAINER1 citations50
US8573236B2Nov 5, 2013
Apparatus and method for ultrasonic wet treatment of plate-like articles
OBWEGER RAINER0 citations47
US8435356B2May 7, 2013
Device and method for wet treating disc-like substrates
OBWEGER RAINER0 citations46
US8261757B2Sep 11, 2012
Device and method for wet treating disc-like substrates
OBWEGER RAINER0 citations46
LAM RES AG
6 patentsUS9597701B2Mar 21, 2017
Apparatus for treating surfaces of wafer-shaped articles
LAM RES AG2 citations72
US11195730B2Dec 7, 2021
Method and apparatus for processing wafer-shaped articles
LAM RES AG2 citations68
US10490426B2Nov 26, 2019
Method and apparatus for processing wafer-shaped articles
LAM RES AG1 citations57
US10043686B2Aug 7, 2018
Apparatus for treating surfaces of wafer-shaped articles
LAM RES AG0 citations51
US10056287B2Aug 21, 2018
Apparatus for treating surfaces of wafer-shaped articles
LAM RES AG0 citations50
US9960057B2May 1, 2018
Device for measuring the distribution or impulse of a series of droplets
LAM RES AG0 citations47