Inventor

CHANG ONE-MOON

KR3 patents

⚠️ This page may combine multiple inventors who share the name “CHANG ONE-MOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHANG ONE-MOON

2 patents

US8734206B2May 27, 2014

Polishing pad for chemical mechanical polishing process and chemical mechanical polishing apparatus including the same

CHANG ONE-MOON21 citations86

US8790158B2Jul 29, 2014

Chemical mechanical polishing apparatus

CHANG ONE-MOON0 citations46

AHN JONG-SUN

1 patent

US8662958B2Mar 4, 2014

Chemical-mechanical polishing apparatus for manufacturing semiconductor devices

AHN JONG-SUN0 citations30