Inventor

BOO JAE-PHIL

KR22 patents

⚠️ This page may combine multiple inventors who share the name “BOO JAE-PHIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BOO JAE-PHIL

SAMSUNG ELECTRONICS CO LTD

Method for fabricating MOS transistor using selective silicide process

Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same

Apparatus for polishing a semiconductor wafer and method therefor

Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same

Polishing station of a chemical mechanical polishing apparatus

Carrier head of chemical mechanical polishing apparatus having barriers dividing pressure chamber into a plurality of pressure zones

Polishing pad for chemical mechanical polishing apparatus

Polishing head of chemical mechanical polishing apparatus and polishing method using the same

Polishing head of chemical mechanical polishing apparatus and polishing method using the same

Polishing head of chemical mechanical polishing apparatus and polishing method using the same

Method for polishing a semiconductor wafer

Apparatus for polishing a semiconductor wafer

Apparatus for polishing a semiconductor wafer and method therefor

Method of fabricating a non-volatile memory device having a tunnel-insulating layer including more than two portions of different thickness

Apparatus and method for treating substrates

Single type apparatus for drying a substrate and single type system for cleaning a substrate including the same

CHANG ONE-MOON

Polishing pad for chemical mechanical polishing process and chemical mechanical polishing apparatus including the same

Chemical mechanical polishing apparatus

LEE SEH KWANG

CMP pad conditioner, and method for producing the CMP pad conditioner

CMP apparatus

SEO KEON SIK

Conditioner of chemical mechanical polishing apparatus

BOO JAE PHIL

Chemical mechanical polishing system