Inventor
IWATO KAORU
JP50 patents
⚠️ This page may combine multiple inventors who share the name “IWATO KAORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJIFILM CORP
25 patentsUS7449573B2Nov 11, 2008
Photosensitive composition, compound for use in the photosensitive composition, and method of pattern formation with the photosensitive composition
FUJIFILM CORP18 citations93
US7625690B2Dec 1, 2009
Positive resist composition and pattern forming method using the same
FUJIFILM CORP24 citations92
US9448482B2Sep 20, 2016
Pattern forming method, resist pattern formed by the method, method for manufacturing electronic device using the same, and electronic device
FUJIFILM CORP9 citations84
US9897922B2Feb 20, 2018
Method of forming pattern and developer for use in the method
FUJIFILM CORP10 citations83
US9417528B2Aug 16, 2016
Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device
FUJIFILM CORP7 citations83
US9291892B2Mar 22, 2016
Actinic ray-sensitive or radiation-sensitive resin composition, and, resist film, pattern forming method, electronic device manufacturing method, and electronic device, each using the composition
FUJIFILM CORP7 citations73
US8999622B2Apr 7, 2015
Pattern forming method, chemical amplification resist composition and resist film
FUJIFILM CORP4 citations73
US9718901B2Aug 1, 2017
Resin composition and pattern forming method using the same
FUJIFILM CORP4 citations72
US9250532B2Feb 2, 2016
Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device
FUJIFILM CORP3 citations72
US7887988B2Feb 15, 2011
Positive resist composition and pattern forming method using the same
FUJIFILM CORP5 citations63
US10248019B2Apr 2, 2019
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film
FUJIFILM CORP1 citations62
US9482958B2Nov 1, 2016
Method of forming pattern and developer for use in the method
FUJIFILM CORP2 citations62
US9075310B2Jul 7, 2015
Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device
FUJIFILM CORP2 citations62
US9411230B2Aug 9, 2016
Pattern forming method, electron beam-sensitive or extreme ultraviolet-sensitive composition, resist film, method for manufacturing electronic device using the same, and electronic device
FUJIFILM CORP1 citations52
US8956802B2Feb 17, 2015
Pattern forming method, chemical amplification resist composition and resist film
FUJIFILM CORP0 citations52
US8753802B2Jun 17, 2014
Pattern forming method, chemical amplification resist composition and resist film
FUJIFILM CORP0 citations52
US8362170B2Jan 29, 2013
Polymerizable compound and polymer compound obtained by using the same
FUJIFILM CORP0 citations52
US7442490B2Oct 28, 2008
Positive resist composition and pattern formation method using the positive resist composition
FUJIFILM CORP0 citations52
US7700261B2Apr 20, 2010
Positive photosensitive composition and a pattern-forming method using the same
FUJIFILM CORP1 citations48
US9915870B2Mar 13, 2018
Pattern forming method, composition kit and resist film, and method for producing electronic device using them, and electronic device
FUJIFILM CORP0 citations42
US7687219B2Mar 30, 2010
Positive resist composition and pattern formation method using the positive resist composition
FUJIFILM CORP0 citations42
US7632623B2Dec 15, 2009
Positive resist composition and pattern formation method using the positive resist composition
FUJIFILM CORP0 citations42
US9086627B2Jul 21, 2015
Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, manufacturing method of electronic device, and electronic device
FUJIFILM CORP0 citations41
US8859192B2Oct 14, 2014
Negative pattern forming method and resist pattern
FUJIFILM CORP0 citations41
US9454079B2Sep 27, 2016
Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern
FUJIFILM CORP0 citations40
IWATO KAORU
8 patentsUS8822129B2Sep 2, 2014
Pattern forming method, electron beam-sensitive or extreme ultraviolet-sensitive composition, resist film, manufacturing method of electronic device, and electronic device
IWATO KAORU12 citations83
US9760003B2Sep 12, 2017
Pattern forming method and actinic-ray- or radiation-sensitive resin composition
IWATO KAORU2 citations72
US8722319B2May 13, 2014
Pattern forming method, chemical amplification resist composition and resist film
IWATO KAORU0 citations51
US9140981B2Sep 22, 2015
Actinic-ray-sensitive or radiation-sensitive resin composition, and resist film using the same, pattern forming method, electronic device manufacturing method, and electronic device, each using the same
IWATO KAORU0 citations41
US9017917B2Apr 28, 2015
Resist composition and method of forming pattern therewith
IWATO KAORU0 citations41
US8993211B2Mar 31, 2015
Actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film and pattern forming method using the same
IWATO KAORU0 citations41
US10126653B2Nov 13, 2018
Pattern forming method and resist composition
IWATO KAORU0 citations40
US8808965B2Aug 19, 2014
Pattern forming method, pattern, chemical amplification resist composition and resist film
IWATO KAORU0 citations40
FUJI PHOTO FILM CO LTD
3 patentsENOMOTO YUICHIRO
3 patentsUS8999621B2Apr 7, 2015
Pattern forming method, chemical amplification resist composition and resist film
ENOMOTO YUICHIRO4 citations72
US9097973B2Aug 4, 2015
Method of forming pattern and developer for use in the method
ENOMOTO YUICHIRO2 citations61
US9223219B2Dec 29, 2015
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film
ENOMOTO YUICHIRO0 citations51
HIRANO SHUJI
2 patentsSAEGUSA HIROSHI
2 patentsUS8795944B2Aug 5, 2014
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the composition
SAEGUSA HIROSHI2 citations61
US9152048B2Oct 6, 2015
Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition
SAEGUSA HIROSHI0 citations35