Inventor
HONBORI ISAO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “HONBORI ISAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONY CORP
4 patentsUS5945008AAug 31, 1999
Method and apparatus for plasma control
SONY CORP60 citations94
US6255220B1Jul 3, 2001
Method and apparatus for plasma control
SONY CORP17 citations91
US5431769AJul 11, 1995
Method and system for plasma treatment
SONY CORP37 citations89
US6777355B2Aug 17, 2004
Manufacturing apparatus and manufacturing method for semiconductor device
SONY CORP11 citations72