Inventor

CZERKAS SLAWOMIR

DE5 patents

⚠️ This page may combine multiple inventors who share the name “CZERKAS SLAWOMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US10303153B2May 28, 2019

Method and computer program product for controlling the positioning of patterns on a substrate in a manufacturing process

KLA TENCOR CORP3 citations70

US9424636B2Aug 23, 2016

Method for measuring positions of structures on a mask and thereby determining mask manufacturing errors

KLA TENCOR CORP1 citations46

VISTEC SEMICONDUCTOR SYS GMBH

1 patent

US7826068B2Nov 2, 2010

Method for correcting measured values resulting from the bending of a substrate

VISTEC SEMICONDUCTOR SYS GMBH12 citations79

FRICKE WOLFGANG

1 patent

US8115808B2Feb 14, 2012

Coordinate measuring machine and method for calibrating the coordinate measuring machine

FRICKE WOLFGANG4 citations54

CZERKAS SLAWOMIR

1 patent

US8149383B2Apr 3, 2012

Method for determining the systematic error in the measurement of positions of edges of structures on a substrate resulting from the substrate topology

CZERKAS SLAWOMIR2 citations52