Inventor
KANG MICHAEL
US15 patents
⚠️ This page may combine multiple inventors who share the name “KANG MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KANG MICHAEL
5 patentsUS9022582B2May 5, 2015
High dynamic range projection system
KANG MICHAEL24 citations91
US8562785B2Oct 22, 2013
Gas distribution showerhead for inductively coupled plasma etch reactor
KANG MICHAEL20 citations91
US9245717B2Jan 26, 2016
Gas distribution system for ceramic showerhead of plasma etch reactor
KANG MICHAEL10 citations83
US9269309B2Feb 23, 2016
Dual modulation using concurrent portions of luminance patterns in temporal fields
KANG MICHAEL0 citations51
US9378685B2Jun 28, 2016
Artifact mitigation method and apparatus for images generated using three dimensional color synthesis
KANG MICHAEL0 citations40
LAM RES CORP
4 patentsUS9099398B2Aug 4, 2015
Gas distribution showerhead for inductively coupled plasma etch reactor
LAM RES CORP41 citations97
US8970114B2Mar 3, 2015
Temperature controlled window of a plasma processing chamber component
LAM RES CORP118 citations91
US9934979B2Apr 3, 2018
Gas distribution showerhead for inductively coupled plasma etch reactor
LAM RES CORP4 citations72
US10366865B2Jul 30, 2019
Gas distribution system for ceramic showerhead of plasma etch reactor
LAM RES CORP1 citations62