Inventor
KNUPP SETH L
US5 patents
Patents
5 patentsUS8980715B2Mar 17, 2015
Multilayer dielectric structures for semiconductor nano-devices
IBM8 citations83
US8981466B2Mar 17, 2015
Multilayer dielectric structures for semiconductor nano-devices
IBM13 citations83
US10643890B2May 5, 2020
Ultrathin multilayer metal alloy liner for nano Cu interconnects
IBM3 citations72
US11177167B2Nov 16, 2021
Ultrathin multilayer metal alloy liner for nano Cu interconnects
IBM0 citations61
US9331073B2May 3, 2016
Epitaxially grown quantum well finFETs for enhanced pFET performance
IBM0 citations40