Inventor

VAN ERVE JANTIEN LAURA

NL3 patents

Patents

3 patents

US11860546B2Jan 2, 2024

Fluid handling structure for lithographic apparatus

ASML NETHERLANDS BV0 citations59

US11454892B2Sep 27, 2022

Fluid handling structure for lithographic apparatus

ASML NETHERLANDS BV0 citations59

US11029607B2Jun 8, 2021

Fluid handling structure for lithographic apparatus

ASML NETHERLANDS BV0 citations59