Inventor
YUN HYUN JOO
KR3 patents
Patents
3 patentsUS7044833B2May 16, 2006
Apparatus for transporting and polishing wafers
SAMSUNG ELECTRONICS CO LTD2 citations61
US7090570B2Aug 15, 2006
Chemical mechanical polishing apparatus and methods using a polishing surface with non-uniform rigidity
SAMSUNG ELECTRONICS CO LTD4 citations55
US7491118B2Feb 17, 2009
Chemical mechanical polishing apparatus and methods using a polishing surface with non-uniform rigidity
SAMSUNG ELECTRONICS CO LTD1 citations45