Inventor
DEL PUERTO SANTIAGO
US9 patents
⚠️ This page may combine multiple inventors who share the name “DEL PUERTO SANTIAGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
8 patentsUS6906783B2Jun 14, 2005
System for using a two part cover for protecting a reticle
ASML HOLDING NV79 citations95
US6826451B2Nov 30, 2004
Lithography tool having a vacuum reticle library coupled to a vacuum chamber
ASML HOLDING NV67 citations92
US6994444B2Feb 7, 2006
Method and apparatus for managing actinic intensity transients in a lithography mirror
ASML HOLDING NV21 citations91
US7304720B2Dec 4, 2007
System for using a two part cover for protecting a reticle
ASML HOLDING NV28 citations90
US7163301B2Jan 16, 2007
Method and apparatus for managing actinic intensity transients in a lithography mirror
ASML HOLDING NV11 citations83
US7830497B2Nov 9, 2010
System and method for using a two part cover and a box for protecting a reticle
ASML HOLDING NV10 citations82
US7057711B2Jun 6, 2006
Lithography tool having a vacuum reticle library coupled to a vacuum chamber
ASML HOLDING NV12 citations80
US7105836B2Sep 12, 2006
Method and apparatus for cooling a reticle during lithographic exposure
ASML HOLDING NV10 citations73