Inventor

NORRIS GREGG ALEXANDER

US2 patents

Patents

2 patents

US7176470B1Feb 13, 2007

Technique for high-efficiency ion implantation

VARIAN SEMICONDUCTOR EQUIPMENT54 citations91

US7355188B2Apr 8, 2008

Technique for uniformity tuning in an ion implanter system

VARIAN SEMICONDUCTOR EQUIPMENT13 citations80