Inventor

STEEGHS MARCO MATHEUS LOUIS

NL3 patents

⚠️ This page may combine multiple inventors who share the name “STEEGHS MARCO MATHEUS LOUIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US10845706B2Nov 24, 2020

Mirror array

ASML NETHERLANDS BV2 citations61

US12411415B2Sep 9, 2025

Lithographic apparatus and method for illumination uniformity correction

ASML NETHERLANDS BV0 citations35

WINKLER STEFFEN

1 patent

US8699000B2Apr 15, 2014

Illumination system for a lithographic apparatus

WINKLER STEFFEN0 citations19