Inventor
KIKUNAGA Takahiro
JP5 patents
Patents
5 patentsUS11479744B2Oct 25, 2022
Composition having suppressed alumina damage and production method for semiconductor substrate using same
MITSUBISHI GAS CHEMICAL CO0 citations59
US11352593B2Jun 7, 2022
Aqueous composition and cleaning method using same
MITSUBISHI GAS CHEMICAL CO0 citations59
US11441109B2Sep 13, 2022
Cleaning solution for removing dry etching residue and method for manufacturing semiconductor substrate using same
MITSUBISHI GAS CHEMICAL CO0 citations55
US11629315B2Apr 18, 2023
Aqueous composition and cleaning method using same
MITSUBISHI GAS CHEMICAL CO0 citations48
US11613720B2Mar 28, 2023
Aqueous composition and cleaning method using same
MITSUBISHI GAS CHEMICAL CO0 citations48