Inventor
YOO JIN-HYUK
KR15 patents
⚠️ This page may combine multiple inventors who share the name “YOO JIN-HYUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JUSUNG ENG CO LTD
8 patentsUS11600512B2Mar 7, 2023
Substrate processing apparatus and rotating electrical connector for vacuum
JUSUNG ENG CO LTD1 citations57
US11469130B2Oct 11, 2022
Substrate processing apparatus and rotating electrical connector for vacuum
JUSUNG ENG CO LTD0 citations57
US11361984B2Jun 14, 2022
Substrate processing apparatus
JUSUNG ENG CO LTD0 citations51
US8039406B2Oct 18, 2011
Method of gap-filling using amplitude modulation radiofrequency power and apparatus for the same
JUSUNG ENG CO LTD0 citations51
US7605084B2Oct 20, 2009
Method of gap-filling using amplitude modulation radio frequency power
JUSUNG ENG CO LTD0 citations51
US7866341B2Jan 11, 2011
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
JUSUNG ENG CO LTD0 citations45
US7695231B2Apr 13, 2010
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
JUSUNG ENG CO LTD0 citations45
US10373821B2Aug 6, 2019
Substrate processing method
JUSUNG ENG CO LTD0 citations39
SAMSUNG ELECTRONICS CO LTD
5 patentsUS10043879B1Aug 7, 2018
Semiconductor devices utilizing capping layers with multiple widths and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD17 citations85
US10553582B2Feb 4, 2020
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD6 citations83
US9214409B2Dec 15, 2015
Semiconductor device
SAMSUNG ELECTRONICS CO LTD12 citations83
US8017485B2Sep 13, 2011
Methods of fabricating a semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations60
US10797051B2Oct 6, 2020
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations51