Inventor
LAFORCE MARK R
US4 patents
Patents
4 patentsUS6275051B1Aug 14, 2001
Segmented architecture for wafer test and burn-in
IBM127 citations96
US5001423AMar 19, 1991
Dry interface thermal chuck temperature control system for semiconductor wafer testing
IBM210 citations93
US6262582B1Jul 17, 2001
Mechanical fixture for holding electronic devices under test showing adjustments in multiple degrees of freedom
IBM30 citations91
US6504392B2Jan 7, 2003
Actively controlled heat sink for convective burn-in oven
IBM38 citations89