Inventor

KOMATSU KOUICHIROU

JP3 patents

Patents

3 patents

US5506684AApr 9, 1996

Projection scanning exposure apparatus with synchronous mask/wafer alignment system

NIKON CORP172 citations97

US5689339ANov 18, 1997

Alignment apparatus

NIKON CORP48 citations92

US5184196AFeb 2, 1993

Projection exposure apparatus

NIKON CORP53 citations90