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Inventor
LAUBER JAN A
US
3 patents
⚠️ This page may combine multiple inventors who share the name “LAUBER JAN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
2 patents
US9293298B2
Mar 22, 2016
Defect discovery and inspection sensitivity optimization using automated classification of corresponding electron beam images
KLA TENCOR CORP
7 citations
79
US9311698B2
Apr 12, 2016
Detecting defects on a wafer using template image matching
KLA TENCOR CORP
12 citations
78
KLA TENCOR TECH CORP
1 patent
US6828571B1
Dec 7, 2004
Apparatus and methods of controlling surface charge and focus
KLA TENCOR TECH CORP
40 citations
89