Inventor

GIANOULAKIS STEVEN

US3 patents

Patents

3 patents

US6793733B2Sep 21, 2004

Gas distribution showerhead

APPLIED MATERIALS INC145 citations97

US7452827B2Nov 18, 2008

Gas distribution showerhead featuring exhaust apertures

APPLIED MATERIALS INC41 citations90

US6684523B2Feb 3, 2004

Particle removal apparatus

APPLIED MATERIALS INC12 citations71