Inventor
WORKMAN BRAD
US2 patents
Patents
2 patentsUS7022546B2Apr 4, 2006
Method and device for protecting micro electromechanical systems structures during dicing of a wafer
ANALOG DEVICES INC21 citations87
US6946366B2Sep 20, 2005
Method and device for protecting micro electromechanical systems structures during dicing of a wafer
ANALOG DEVICES INC8 citations68