Inventor
VAN DONKELAAR EDWIN TEUNIS
NL4 patents
Patents
4 patentsUS7289858B2Oct 30, 2007
Lithographic motion control system and method
ASML NETHERLANDS BV14 citations80
US7271917B2Sep 18, 2007
Lithographic apparatus, position quantity detection system and method
ASML NETHERLANDS BV9 citations65
US7148950B2Dec 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57
US7774287B2Aug 10, 2010
System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48