Inventor
EMI KEIKO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “EMI KEIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
6 patentsUS7740991B2Jun 22, 2010
Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam
NUFLARE TECHNOLOGY INC19 citations92
US8352889B2Jan 8, 2013
Beam dose computing method and writing method and record carrier body and writing apparatus
NUFLARE TECHNOLOGY INC5 citations83
US7669174B2Feb 23, 2010
Pattern generation method and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC10 citations83
US7525110B2Apr 28, 2009
Multiple irradiation effect-corrected dose determination technique for charged particle beam lithography
NUFLARE TECHNOLOGY INC14 citations83
US7511290B2Mar 31, 2009
Charged particle beam writing method and apparatus
NUFLARE TECHNOLOGY INC16 citations83
US7619230B2Nov 17, 2009
Charged particle beam writing method and apparatus and readable storage medium
NUFLARE TECHNOLOGY INC10 citations82