Inventor
VARADARAJAN SESHA
US12 patents
⚠️ This page may combine multiple inventors who share the name “VARADARAJAN SESHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
5 patentsUS6793796B2Sep 21, 2004
Electroplating process for avoiding defects in metal features of integrated circuit devices
NOVELLUS SYSTEMS INC92 citations98
US7745346B2Jun 29, 2010
Method for improving process control and film conformality of PECVD film
NOVELLUS SYSTEMS INC538 citations96
US9355886B2May 31, 2016
Conformal film deposition for gapfill
NOVELLUS SYSTEMS INC53 citations93
US6884335B2Apr 26, 2005
Electroplating using DC current interruption and variable rotation rate
NOVELLUS SYSTEMS INC23 citations90
US8377824B1Feb 19, 2013
Methods and apparatus for depositing copper on tungsten
NOVELLUS SYSTEMS INC0 citations49
LAM RES CORP
5 patentsUS9793096B2Oct 17, 2017
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP16 citations92
US10665429B2May 26, 2020
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP6 citations83
US9460915B2Oct 4, 2016
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP3 citations71
US11127567B2Sep 21, 2021
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP0 citations62
US9852901B2Dec 26, 2017
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP0 citations51