P

Inventor

SHODA NAOHIRO

US11 patents
⚠️ This page may combine multiple inventors who share the name “SHODA NAOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

5 patents
US6406545B2Jun 18, 2002

Semiconductor workpiece processing apparatus and method

TOSHIBA KK55 citations92
US5689140ANov 18, 1997

Method for forming studs and interconnects in a multi-layered semiconductor device

TOSHIBA KK35 citations92
US5652040AJul 29, 1997

Magnetic recording medium

TOSHIBA KK5 citations73
US5950099ASep 7, 1999

Method of forming an interconnect

TOSHIBA KK6 citations62
US5458947AOct 17, 1995

Magnetic recording medium

TOSHIBA KK2 citations62

SIEMENS AG

2 patents
US5937541AAug 17, 1999

Semiconductor wafer temperature measurement and control thereof using gas temperature measurement

SIEMENS AG60 citations95
US5992046ANov 30, 1999

Semiconductor wafer temperature measurement and control thereof using gas temperature measurement

SIEMENS AG13 citations73

TOSHIBA AMERICA ELECTRONIC

1 patent
US5529953AJun 25, 1996

Method of forming studs and interconnects in a multi-layered semiconductor device

TOSHIBA AMERICA ELECTRONIC75 citations95

NOVELLUS SYSTEMS INC

1 patent
US9355886B2May 31, 2016

Conformal film deposition for gapfill

NOVELLUS SYSTEMS INC53 citations93

ASHTIANI KAIHAN

1 patent
US8728958B2May 20, 2014

Gap fill integration

ASHTIANI KAIHAN26 citations91

SIEMENS MICROELECTRONICS INC

1 patent
US6150072ANov 21, 2000

Method of manufacturing a shallow trench isolation structure for a semiconductor device

SIEMENS MICROELECTRONICS INC15 citations73