Inventor
TERASHI TAKAAKI
JP3 patents
Patents
3 patentsUS6934009B2Aug 23, 2005
Illumination apparatus, illumination-controlling method, exposure apparatus, device fabricating method
CANON KK38 citations85
US8035668B2Oct 11, 2011
Exposure apparatus and device manufacturing method
CANON KK1 citations51
US7623219B2Nov 24, 2009
Exposure apparatus, exposure method, device manufacturing method
CANON KK0 citations45