Inventor

MUNOZ NINI

US3 patents

⚠️ This page may combine multiple inventors who share the name “MUNOZ NINI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US9293301B2Mar 22, 2016

In situ control of ion angular distribution in a processing apparatus

VARIAN SEMICONDUCTOR EQUIPMENT7 citations82

US9336998B2May 10, 2016

Apparatus and method for dynamic control of ion beam energy and angle

VARIAN SEMICONDUCTOR EQUIPMENT3 citations71

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

1 patent

US9620335B2Apr 11, 2017

In situ control of ion angular distribution in a processing apparatus

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71