Inventor
OH HYEOKSANG
KR3 patents
Patents
3 patentsUS10446495B2Oct 15, 2019
Methods of forming an ultra-low-k dielectric layer and dielectric layers formed thereby
SAMSUNG ELECTRONICS CO LTD0 citations47
US7863185B2Jan 4, 2011
Artificially tilted via connection
SAMSUNG ELECTRONICS CO LTD0 citations39
US9953827B2Apr 24, 2018
Method of forming semiconductor device having dielectric layer and related system
SAMSUNG ELECTRONICS CO LTD0 citations38