Inventor

SHADMAN FARHANG F

US10 patents

⚠️ This page may combine multiple inventors who share the name “SHADMAN FARHANG F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ENVIRONMENTAL METROLOGY CORP

4 patents

US7332902B1Feb 19, 2008

Micro sensor for electrochemically monitoring residue in micro channels

ENVIRONMENTAL METROLOGY CORP40 citations90

US7489141B1Feb 10, 2009

Surface micro sensor and method

ENVIRONMENTAL METROLOGY CORP11 citations82

US7932726B1Apr 26, 2011

Method of design optimization and monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS)

ENVIRONMENTAL METROLOGY CORP4 citations60

US7317317B1Jan 8, 2008

Shielded micro sensor and method for electrochemically monitoring residue in micro features

ENVIRONMENTAL METROLOGY CORP5 citations60

UNIV ARIZONA

2 patents

US5637544AJun 10, 1997

Reactive membrane for filtration and purification of gases of impurities and method utilizing the same

UNIV ARIZONA36 citations91

US5635148AJun 3, 1997

Reactive membrane for filtration and purification of gases of impurities and method utilizing the same

UNIV ARIZONA19 citations91

VERMEIRE BERT M

2 patents

US8253422B2Aug 28, 2012

Method of manufacture of wafers using an electro-chemical residue sensor (ECRS)

VERMEIRE BERT M6 citations80

US8120368B2Feb 21, 2012

Method of monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS)

VERMEIRE BERT M0 citations48

ARIZONA BOARD OF REAGENTS ACTI

1 patent

US5302356AApr 12, 1994

Ultrapure water treatment system

ARIZONA BOARD OF REAGENTS ACTI133 citations92

ARIZONA BOARD OF REAGENTS

1 patent

US5196380AMar 23, 1993

Reactive membrane for filtration and purification of gases of impurities

ARIZONA BOARD OF REAGENTS33 citations91