Inventor
NEMOTO TAKENAO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “NEMOTO TAKENAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS6992011B2Jan 31, 2006
Method and apparatus for removing material from chamber and wafer surfaces by high temperature hydrogen-containing plasma
TOKYO ELECTRON LTD25 citations89
US9165771B2Oct 20, 2015
Pulsed gas plasma doping method and apparatus
TOKYO ELECTRON LTD3 citations61
US10553410B2Feb 4, 2020
Method of processing workpiece
TOKYO ELECTRON LTD1 citations59
US9543191B2Jan 10, 2017
Wiring structure having interlayer insulating film and wiring line without a barrier layer between
TOKYO ELECTRON LTD0 citations46
US9765430B2Sep 19, 2017
Plasma processing apparatus and film formation method
TOKYO ELECTRON LTD0 citations39