Inventor
ARMACOST MICHAEL
US6 patents
Patents
6 patentsUS5466626ANov 14, 1995
Micro mask comprising agglomerated material
IBM50 citations94
US6342722B1Jan 29, 2002
Integrated circuit having air gaps between dielectric and conducting lines
IBM37 citations92
US5766968AJun 16, 1998
Micro mask comprising agglomerated material
IBM17 citations84
US6090722AJul 18, 2000
Process for fabricating a semiconductor structure having a self-aligned spacer
IBM14 citations73
US6228279B1May 8, 2001
High-density plasma, organic anti-reflective coating etch system compatible with sensitive photoresist materials
IBM9 citations71
US6232222B1May 15, 2001
Method of eliminating a critical mask using a blockout mask and a resulting semiconductor structure
IBM6 citations62