Inventor
STEPHENS DONALD
US6 patents
⚠️ This page may combine multiple inventors who share the name “STEPHENS DONALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS6625835B1Sep 30, 2003
Disk cascade scrubber
LAM RES CORP64 citations94
US6588043B1Jul 8, 2003
Wafer cascade scrubber
LAM RES CORP36 citations91
US6446355B1Sep 10, 2002
Disk drying apparatus and method
LAM RES CORP16 citations90
US6430841B1Aug 13, 2002
Apparatus for drying batches of wafers
LAM RES CORP15 citations90
US6477786B1Nov 12, 2002
Apparatus for drying batches of disks
LAM RES CORP9 citations71