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Inventor
JEONG JAE-JEONG
KR
3 patents
⚠️ This page may combine multiple inventors who share the name “JEONG JAE-JEONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
1 patent
US7918910B2
Apr 5, 2011
Unit for eliminating particles and apparatus for transferring a substrate having the same
SEMES CO LTD
5 citations
57
LEE SE-WON
1 patent
US8253059B2
Aug 28, 2012
Apparatus and method of cleaning substrate
LEE SE-WON
0 citations
43
AHN YOUNG-KI
1 patent
US8402980B2
Mar 26, 2013
Apparatus and method of generating ultrasonic vibration and apparatus and method of cleaning a wafer using the same
AHN YOUNG-KI
0 citations
38