Inventor
HOSOYA Kohtaro
JP2 patents
Patents
2 patentsUS9362083B2Jun 7, 2016
Charged particle beam apparatus and sample observation method
HITACHI HIGH TECH CORP0 citations46
US10176968B2Jan 8, 2019
Method for adjusting charged particle beam device and adjusting beam aperture based on a selected emission condition and charged particle beam device for same
HITACHI HIGH TECH CORP0 citations38