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Inventor
FURIKI MASANARI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “FURIKI MASANARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI SCIENCE SYSTEMS LTD
1 patent
US7081625B2
Jul 25, 2006
Charged particle beam apparatus
HITACHI SCIENCE SYSTEMS LTD
5 citations
58
HITACHI HIGH TECH CORP
1 patent
US9362083B2
Jun 7, 2016
Charged particle beam apparatus and sample observation method
HITACHI HIGH TECH CORP
0 citations
46