Inventor
HOSALI SHARATH D
US4 patents
Patents
4 patentsUS5738800AApr 14, 1998
Composition and method for polishing a composite of silica and silicon nitride
RODEL INC117 citations98
US6218305B1Apr 17, 2001
Composition and method for polishing a composite of silica and silicon nitride
RODEL INC72 citations95
US6132637AOct 17, 2000
Composition and method for polishing a composite of silica and silicon nitride
RODEL INC44 citations95
US6042741AMar 28, 2000
Composition for polishing a composite of silica and silicon nitride
RODEL INC74 citations95