Inventor
SEMMLER ARMIN
DE4 patents
⚠️ This page may combine multiple inventors who share the name “SEMMLER ARMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
3 patentsUS6631511B2Oct 7, 2003
Generating mask layout data for simulation of lithographic processes
INFINEON TECHNOLOGIES AG48 citations90
US7011936B2Mar 14, 2006
Photomask and method of structuring a photoresist by double exposure with imaging auxiliary structures and different exposure tools
INFINEON TECHNOLOGIES AG13 citations82
US6756164B2Jun 29, 2004
Exposure mask with repaired dummy structure and method of repairing an exposure mask
INFINEON TECHNOLOGIES AG6 citations60