Inventor
VERBEEK MARTIN
DE4 patents
Patents
4 patentsUS6756164B2Jun 29, 2004
Exposure mask with repaired dummy structure and method of repairing an exposure mask
INFINEON TECHNOLOGIES AG6 citations60
US7262850B2Aug 28, 2007
Method for inspection of periodic grating structures on lithography masks
INFINEON TECHNOLOGIES AG3 citations59
US7108798B2Sep 19, 2006
Defect repair method, in particular for repairing quartz defects on alternating phase shift masks
INFINEON TECHNOLOGIES AG2 citations59
US7424144B2Sep 9, 2008
Method for checking periodic structures on lithography masks
INFINEON TECHNOLOGIES AG0 citations38