Inventor

ABRAMS ALLAN D

US3 patents

Patents

3 patents

US4624740ANov 25, 1986

Tailoring of via-hole sidewall slope

IBM12 citations66

US7001827B2Feb 21, 2006

Semiconductor wafer front side protection

IBM3 citations57

US7288465B2Oct 30, 2007

Semiconductor wafer front side protection

IBM1 citations46