Inventor

KIMOTO TAKAKAZU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KIMOTO TAKAKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

2 patents

US9523911B2Dec 20, 2016

Radiation-sensitive resin composition, resist pattern-forming method, acid generator and compound

JSR CORP1 citations48

US8980529B2Mar 17, 2015

Radiation-sensitive resin composition, polymer, and resist pattern-forming method

JSR CORP1 citations47

KIMOTO TAKAKAZU

1 patent

US8765355B2Jul 1, 2014

Radiation sensitive resin composition, method for forming a pattern, polymer and compound

KIMOTO TAKAKAZU0 citations41