P

Inventor

IGO TETSUYA

JP7 patents
⚠️ This page may combine multiple inventors who share the name “IGO TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NISSIN ION EQUIPMENT CO LTD

3 patents
US9142386B2Sep 22, 2015

Ion beam line

NISSIN ION EQUIPMENT CO LTD5 citations71
US8664861B1Mar 4, 2014

Plasma generator

NISSIN ION EQUIPMENT CO LTD2 citations61
US7772573B2Aug 10, 2010

Ion implanting apparatus and method of correcting beam orbit

NISSIN ION EQUIPMENT CO LTD2 citations61

IKEJIRI TADASHI

1 patent
US8702920B2Apr 22, 2014

Repeller structure and ion source

IKEJIRI TADASHI12 citations78

IGO TETSUYA

1 patent
US8389964B2Mar 5, 2013

Ion implanting apparatus and deflecting electrode

IGO TETSUYA8 citations77

YAMASHITA TAKATOSHI

1 patent
US8253114B2Aug 28, 2012

Ion source

YAMASHITA TAKATOSHI9 citations77

FUJITA HIDEKI

1 patent
US8569955B2Oct 29, 2013

Plasma generator

FUJITA HIDEKI0 citations38