Inventor

KIM RYEUN KWAN

KR3 patents

Patents

3 patents

US7824743B2Nov 2, 2010

Deposition processes for titanium nitride barrier and aluminum

APPLIED MATERIALS INC24 citations89

US10199388B2Feb 5, 2019

VNAND tensile thick TEOS oxide

APPLIED MATERIALS INC1 citations58

US10483282B2Nov 19, 2019

VNAND tensile thick TEOS oxide

APPLIED MATERIALS INC0 citations47