Inventor
REINWALD GERALD
AT2 patents
Patents
2 patentsUS10217636B2Feb 26, 2019
Method of manufacturing a silicon carbide semiconductor device by removing amorphized portions
INFINEON TECHNOLOGIES AG2 citations69
US9934972B2Apr 3, 2018
Method of manufacturing a silicon carbide semiconductor device by removing amorphized portions
INFINEON TECHNOLOGIES AG0 citations48