Inventor
UNEGG GERALD
AT6 patents
Patents
6 patentsUS10217636B2Feb 26, 2019
Method of manufacturing a silicon carbide semiconductor device by removing amorphized portions
INFINEON TECHNOLOGIES AG2 citations69
US10256097B2Apr 9, 2019
Forming a metal contact layer on silicon carbide and semiconductor device with metal contact structure
INFINEON TECHNOLOGIES AG1 citations61
US10049879B2Aug 14, 2018
Self aligned silicon carbide contact formation using protective layer
INFINEON TECHNOLOGIES AG0 citations49
US9666482B1May 30, 2017
Self aligned silicon carbide contact formation using protective layer
INFINEON TECHNOLOGIES AG0 citations49
US9934972B2Apr 3, 2018
Method of manufacturing a silicon carbide semiconductor device by removing amorphized portions
INFINEON TECHNOLOGIES AG0 citations48
US9917170B2Mar 13, 2018
Carbon based contact structure for silicon carbide device technical field
INFINEON TECHNOLOGIES AG0 citations40