Inventor
KOPPITSCH GUENTHER
AT6 patents
⚠️ This page may combine multiple inventors who share the name “KOPPITSCH GUENTHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AMS AG
3 patentsUS10374114B2Aug 6, 2019
Lateral single-photon avalanche diode and method of producing a lateral single-photon avalanche diode
AMS AG2 citations69
US10062610B2Aug 28, 2018
Method of producing an opening with smooth vertical sidewall in a semiconductor substrate
AMS AG0 citations47
US9466529B2Oct 11, 2016
Masking method for semiconductor devices with high surface topography
AMS AG0 citations46