Inventor

SJMAENOK LEONID AIZIKOVITSJ

NL3 patents

Patents

3 patents

US11287737B2Mar 29, 2022

Metal-silicide-nitridation for stress reduction

ASML NETHERLANDS BV5 citations82

US11971654B2Apr 30, 2024

Metal-silicide-nitridation for stress reduction

ASML NETHERLANDS BV1 citations71

US11686997B2Jun 27, 2023

Metal-silicide-nitridation for stress reduction

ASML NETHERLANDS BV1 citations71