Inventor
WANG WENLING
JP29 patents
⚠️ This page may combine multiple inventors who share the name “WANG WENLING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
19 patentsUS7138607B2Nov 21, 2006
Determining method of thermal processing condition
TOKYO ELECTRON LTD30 citations92
US6803548B2Oct 12, 2004
Batch-type heat treatment apparatus and control method for the batch-type heat treatment apparatus
TOKYO ELECTRON LTD36 citations92
US6787377B2Sep 7, 2004
Determining method of thermal processing condition
TOKYO ELECTRON LTD16 citations92
US6730885B2May 4, 2004
Batch type heat treatment system, method for controlling same, and heat treatment method
TOKYO ELECTRON LTD23 citations92
US6622104B2Sep 16, 2003
Heat treatment apparatus, calibration method for temperature measuring system of the apparatus, and heat treatment system
TOKYO ELECTRON LTD41 citations92
US6329643B1Dec 11, 2001
Method of temperature-calibrating heat treating apparatus
TOKYO ELECTRON LTD28 citations92
US6922522B2Jul 26, 2005
Heat treatment apparatus, calibration method for temperature measuring system of the apparatus, and heat treatment system
TOKYO ELECTRON LTD15 citations84
US9259761B2Feb 16, 2016
Heat treatment system, heat treatment method, and non-transitory computer-readable recording medium
TOKYO ELECTRON LTD3 citations73
US6495805B2Dec 17, 2002
Method of determining set temperature trajectory for heat treatment system
TOKYO ELECTRON LTD12 citations73
US8354135B2Jan 15, 2013
Thermal processing apparatus, method for regulating temperature of thermal processing apparatus, and program
TOKYO ELECTRON LTD4 citations62
US8055372B2Nov 8, 2011
Processing system, processing method, and computer program
TOKYO ELECTRON LTD5 citations62
US7896649B2Mar 1, 2011
Heat system, heat method, and program
TOKYO ELECTRON LTD4 citations62
US7860585B2Dec 28, 2010
Heat processing apparatus, method of automatically tuning control constants, and storage medium
TOKYO ELECTRON LTD2 citations62
US6847015B2Jan 25, 2005
Heat treatment apparatus and controller for heat treatment apparatus and control method for heat treatment apparatus
TOKYO ELECTRON LTD2 citations62
US9207665B2Dec 8, 2015
Heat treatment apparatus and method of controlling the same
TOKYO ELECTRON LTD2 citations61
US7625604B2Dec 1, 2009
Heat treatment method and heat treatment apparatus
TOKYO ELECTRON LTD5 citations61
US9748122B2Aug 29, 2017
Thermal processing apparatus and method of controlling the same
TOKYO ELECTRON LTD0 citations52
US9909809B2Mar 6, 2018
Heat treatment apparatus and method of controlling the same
TOKYO ELECTRON LTD0 citations41
US7869888B2Jan 11, 2011
Information processing apparatus, semiconductor manufacturing system, information processing method, and storage medium
TOKYO ELECTRON LTD0 citations41
YOSHII KOJI
4 patentsUS9324591B2Apr 26, 2016
Heat treatment apparatus and heat treatment method
YOSHII KOJI2 citations61
US9255736B2Feb 9, 2016
Vertical-type heat treatment apparatus
YOSHII KOJI1 citations50
US9209057B2Dec 8, 2015
Temperature control method, storage medium storing a program therefor, temperature control apparatus, and heat treatment apparatus
YOSHII KOJI1 citations50
US8835811B2Sep 16, 2014
Thermal processing apparatus and method of controlling the same
YOSHII KOJI0 citations50