Inventor
YOSHII KOJI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “YOSHII KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
14 patentsUS11114319B2Sep 7, 2021
Heat treatment apparatus and heat treatment method
TOKYO ELECTRON LTD6 citations71
US10431479B2Oct 1, 2019
Heat treatment apparatus and temperature control method
TOKYO ELECTRON LTD2 citations71
US11656126B2May 23, 2023
Heat treatment apparatus and temperature control method
TOKYO ELECTRON LTD0 citations61
US9207665B2Dec 8, 2015
Heat treatment apparatus and method of controlling the same
TOKYO ELECTRON LTD2 citations61
US11390948B2Jul 19, 2022
Film forming apparatus
TOKYO ELECTRON LTD0 citations60
US8821014B2Sep 2, 2014
Temperature sensor and heat treating apparatus
TOKYO ELECTRON LTD3 citations60
US9748122B2Aug 29, 2017
Thermal processing apparatus and method of controlling the same
TOKYO ELECTRON LTD0 citations52
US10533896B2Jan 14, 2020
Heat treatment apparatus and temperature control method
TOKYO ELECTRON LTD0 citations51
US11424143B2Aug 23, 2022
Heat insulation structure at lower end of vertical heat treatment apparatus and vertical heat treatment apparatus including heat insulation structure thereof
TOKYO ELECTRON LTD0 citations50
US10385453B2Aug 20, 2019
Film forming apparatus
TOKYO ELECTRON LTD0 citations49
US11815407B2Nov 14, 2023
Thermocouple structure, heat treatment apparatus, and method of manufacturing thermocouple structure
TOKYO ELECTRON LTD0 citations48
US9909809B2Mar 6, 2018
Heat treatment apparatus and method of controlling the same
TOKYO ELECTRON LTD0 citations41
US10641553B2May 5, 2020
Heat treatment apparatus, regulation method of heat treatment apparatus, and program
TOKYO ELECTRON LTD0 citations36
US9905442B2Feb 27, 2018
Heat treatment apparatus, heat treatment method, and program
TOKYO ELECTRON LTD0 citations36
YOSHII KOJI
4 patentsUS9324591B2Apr 26, 2016
Heat treatment apparatus and heat treatment method
YOSHII KOJI2 citations61
US9255736B2Feb 9, 2016
Vertical-type heat treatment apparatus
YOSHII KOJI1 citations50
US9209057B2Dec 8, 2015
Temperature control method, storage medium storing a program therefor, temperature control apparatus, and heat treatment apparatus
YOSHII KOJI1 citations50
US8835811B2Sep 16, 2014
Thermal processing apparatus and method of controlling the same
YOSHII KOJI0 citations50