Inventor
TANAKA NORIMICHI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA NORIMICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
2 patentsUS6239045B1May 29, 2001
Semiconductor producing apparatus and producing method for epitaxial wafer using same
SHINETSU HANDOTAI KK22 citations89
US7799652B2Sep 21, 2010
Method for producing epitaxial wafer with buried diffusion layer and epitaxial wafer with buried diffusion layer
SHINETSU HANDOTAI KK0 citations47