Inventor
FOURNIER JEFFREY
US3 patents
Patents
3 patentsUS4698234AOct 6, 1987
Vapor deposition of semiconductor material
ENERGY CONVERSION DEVICES INC207 citations98
US4637895AJan 20, 1987
Gas mixtures for the vapor deposition of semiconductor material
ENERGY CONVERSION DEVICES INC300 citations98
US4696758ASep 29, 1987
Gas mixtures for the vapor deposition of semiconductor material
ENERGY CONVERSION DEVICES INC205 citations97